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%0 Conference Paper
%1 conf/essderc/Fenouillet-Beranger17
%A Fenouillet-Béranger, Claire
%A Beaurepaire, S.
%A Deprat, Fabien
%A Sousa, Alexandre Ayres De
%A Brunet, Laurent
%A Batude, Perrine
%A Rozeau, Olivier
%A Andrieu, François
%A Besombes, Paul
%A Samson, M.-P.
%A Previtali, Bernard
%A Nemouchi, F.
%A Rodriguez, G.
%A Rodriguez, Philippe
%A Famulok, R.
%A Rambal, Nils
%A Balan, V.
%A Saghi, Z.
%A Jousseaume, V.
%A Guérin, Charles-Antoine
%A Ibars, F.
%A Proud, F.
%A Nouguier, D.
%A Ney, D.
%A Delaye, V.
%A Dansas, H.
%A Federspiel, X.
%A Vinet, Maud
%B ESSDERC
%D 2017
%I IEEE
%K dblp
%P 252-255
%T Guidelines for intermediate back end of line (BEOL) for 3D sequential integration.
%U http://dblp.uni-trier.de/db/conf/essderc/essderc2017.html#Fenouillet-Beranger17
%@ 978-1-5090-5978-2
@inproceedings{conf/essderc/Fenouillet-Beranger17,
added-at = {2019-10-28T00:00:00.000+0100},
author = {Fenouillet-Béranger, Claire and Beaurepaire, S. and Deprat, Fabien and Sousa, Alexandre Ayres De and Brunet, Laurent and Batude, Perrine and Rozeau, Olivier and Andrieu, François and Besombes, Paul and Samson, M.-P. and Previtali, Bernard and Nemouchi, F. and Rodriguez, G. and Rodriguez, Philippe and Famulok, R. and Rambal, Nils and Balan, V. and Saghi, Z. and Jousseaume, V. and Guérin, Charles-Antoine and Ibars, F. and Proud, F. and Nouguier, D. and Ney, D. and Delaye, V. and Dansas, H. and Federspiel, X. and Vinet, Maud},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2399f9728a0112db65d92393c05b8f148/dblp},
booktitle = {ESSDERC},
crossref = {conf/essderc/2017},
ee = {https://doi.org/10.1109/ESSDERC.2017.8066639},
interhash = {7e60bdc3d50af4144743e34057b3c502},
intrahash = {399f9728a0112db65d92393c05b8f148},
isbn = {978-1-5090-5978-2},
keywords = {dblp},
pages = {252-255},
publisher = {IEEE},
timestamp = {2019-11-02T11:35:54.000+0100},
title = {Guidelines for intermediate back end of line (BEOL) for 3D sequential integration.},
url = {http://dblp.uni-trier.de/db/conf/essderc/essderc2017.html#Fenouillet-Beranger17},
year = 2017
}