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%0 Journal Article
%1 journals/ibmrd/ChiuS97
%A Chiu, George L.-T.
%A Shaw, Jane M.
%D 1997
%J IBM Journal of Research and Development
%K dblp
%N 1&2
%P 3-6
%T Optical lithography: Introduction.
%U http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd41.html#ChiuS97
%V 41
@article{journals/ibmrd/ChiuS97,
added-at = {2008-08-18T00:00:00.000+0200},
author = {Chiu, George L.-T. and Shaw, Jane M.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2afc2cea6e49aa05827eaad2ae56d1c93/dblp},
ee = {http://dx.doi.org/10.1147/rd.411.0003},
interhash = {688abfc7f86acbcd267d91b0b02ca6d8},
intrahash = {afc2cea6e49aa05827eaad2ae56d1c93},
journal = {IBM Journal of Research and Development},
keywords = {dblp},
number = {1&2},
pages = {3-6},
timestamp = {2016-02-02T08:58:51.000+0100},
title = {Optical lithography: Introduction.},
url = {http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd41.html#ChiuS97},
volume = 41,
year = 1997
}
