%0 Conference Paper %1 harsch2018tilted %A Harsch, Antonia %A Pruss, Christof %A Haberl, Alexander %A Osten, Wolfgang %B Fifth European Seminar on Precision Optics Manufacturing %C Bellingham %D 2018 %E Rascher, Rolf %E Fähnle, Oliver %I SPIE %K ubs_10007 ubs_20011 ubs_30114 ubs_40175 unibibliografie wos %N 10829 %P 1082908 %R 10.1117/12.2318573 %T Tilted Wave Interferometry for testing large surfaces %@ 978-1-5106-2271-5

@inproceedings{harsch2018tilted, added-at = {2020-03-27T16:39:34.000+0100}, address = {Bellingham}, affiliation = {Harsch, A (Reprint Author), Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, Stuttgart, Germany. Harsch, Antonia; Pruss, Christof; Osten, Wolfgang, Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, Stuttgart, Germany. Haberl, Alexander, Tech Hsch Deggendorf, Inst Prazis Bearbeitung \& Hochfrequenztech, Technol Campus 1, Teisnach, Germany.}, author = {Harsch, Antonia and Pruss, Christof and Haberl, Alexander and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/24f8bf0b5f224c5bd4a8e3a9ec2ea9988/unibiblio}, booktitle = {Fifth European Seminar on Precision Optics Manufacturing}, doi = {10.1117/12.2318573}, editor = {Rascher, Rolf and Fähnle, Oliver}, eventdate = {2018-04-10/2018-04-11}, eventtitle = {5th European Seminar on Precision Optics Manufacturing}, interhash = {66e360cbcd32bf7d5f1f37e7dd6a1c57}, intrahash = {4f8bf0b5f224c5bd4a8e3a9ec2ea9988}, isbn = {978-1-5106-2271-5}, keywords = {ubs_10007 ubs_20011 ubs_30114 ubs_40175 unibibliografie wos}, language = {eng}, number = 10829, pages = 1082908, publisher = {SPIE}, research-areas = {Engineering; Optics}, series = {Proceedings of SPIE}, timestamp = {2024-03-14T12:42:31.000+0100}, title = {Tilted Wave Interferometry for testing large surfaces}, unique-id = {ISI:000450861000007}, venue = {Teisnach}, year = 2018 }