%0 Journal Article %1 journals/mr/LiTRGM05 %A Li, Y.-L. %A Tokei, Zsolt %A Roussel, Philippe %A Groeseneken, Guido %A Maex, Karen %D 2005 %J Microelectronics Reliability %K dblp %N 9-11 %P 1299-1304 %T Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability. %U http://dblp.uni-trier.de/db/journals/mr/mr45.html#LiTRGM05 %V 45

@article{journals/mr/LiTRGM05, added-at = {2016-05-09T00:00:00.000+0200}, author = {Li, Y.-L. and Tokei, Zsolt and Roussel, Philippe and Groeseneken, Guido and Maex, Karen}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b79444572b4331e391f437b59c939973/dblp}, ee = {http://dx.doi.org/10.1016/j.microrel.2005.07.010}, interhash = {4d28496a169778c000828273fe295146}, intrahash = {b79444572b4331e391f437b59c939973}, journal = {Microelectronics Reliability}, keywords = {dblp}, number = {9-11}, pages = {1299-1304}, timestamp = {2016-05-10T09:32:01.000+0200}, title = {Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability.}, url = {http://dblp.uni-trier.de/db/journals/mr/mr45.html#LiTRGM05}, volume = 45, year = 2005 }