%0 Journal Article %1 article %A Tavrov, Alexander %A Totzeck, Michael %A Kerwien, Norbert %A J. Tiziani, Hans %D 2002 %E Engineering, Optical %J Optical Engineering - OPT ENG %K ito reviewed %P 1886-1892 %R 10.1117/1.1490589 %T Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio %V 41

@article{article, added-at = {2019-05-09T14:56:14.000+0200}, author = {Tavrov, Alexander and Totzeck, Michael and Kerwien, Norbert and J. Tiziani, Hans}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/209b61f078e8fd9e3aef03b8cd1720702/vogelfrau}, doi = {10.1117/1.1490589}, editor = {Engineering, Optical}, interhash = {47a00f351c3493f62ef0001bed788a8b}, intrahash = {09b61f078e8fd9e3aef03b8cd1720702}, journal = {Optical Engineering - OPT ENG}, keywords = {ito reviewed}, month = {08}, pages = {1886-1892}, timestamp = {2019-05-09T12:56:14.000+0200}, title = {Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio}, volume = 41, year = 2002 }