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%0 Journal Article
%1 karmous2011local
%A Karmous, A.
%A Oehme, Michael
%A Werner, J.
%A Kirfel, O.
%A Kasper, Erich
%A Schulze, Jörg
%D 2011
%I Elsevier BV
%J Journal of Crystal Growth
%K
%N 1
%P 154-156
%R 10.1016/j.jcrysgro.2011.04.006
%T Local strained silicon platform based on differential SiGe/Si epitaxy
%V 324
@article{karmous2011local,
added-at = {2023-08-31T16:34:21.000+0200},
author = {Karmous, A. and Oehme, Michael and Werner, J. and Kirfel, O. and Kasper, Erich and Schulze, Jörg},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/21f920d9bba736154e3e6bc0b64601a90/puma-wartung},
doi = {10.1016/j.jcrysgro.2011.04.006},
interhash = {3776063d172877b5d24c97cbcb3cd602},
intrahash = {1f920d9bba736154e3e6bc0b64601a90},
issn = {0022-0248},
journal = {Journal of Crystal Growth},
keywords = {},
language = {eng},
number = 1,
pages = {154-156},
publisher = {Elsevier BV},
timestamp = {2023-08-31T14:34:21.000+0200},
title = {Local strained silicon platform based on differential SiGe/Si epitaxy},
volume = 324,
year = 2011
}