%0 Journal Article %1 karmous2011local %A Karmous, A. %A Oehme, Michael %A Werner, J. %A Kirfel, O. %A Kasper, Erich %A Schulze, Jörg %D 2011 %I Elsevier BV %J Journal of Crystal Growth %K %N 1 %P 154-156 %R 10.1016/j.jcrysgro.2011.04.006 %T Local strained silicon platform based on differential SiGe/Si epitaxy %V 324

@article{karmous2011local, added-at = {2023-08-31T16:34:21.000+0200}, author = {Karmous, A. and Oehme, Michael and Werner, J. and Kirfel, O. and Kasper, Erich and Schulze, Jörg}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/21f920d9bba736154e3e6bc0b64601a90/puma-wartung}, doi = {10.1016/j.jcrysgro.2011.04.006}, interhash = {3776063d172877b5d24c97cbcb3cd602}, intrahash = {1f920d9bba736154e3e6bc0b64601a90}, issn = {0022-0248}, journal = {Journal of Crystal Growth}, keywords = {}, language = {eng}, number = 1, pages = {154-156}, publisher = {Elsevier BV}, timestamp = {2023-08-31T14:34:21.000+0200}, title = {Local strained silicon platform based on differential SiGe/Si epitaxy}, volume = 324, year = 2011 }