%0 Journal Article %1 GelWal05 %A de Gelder, E. %A van de Wal, M. %A Scherer, C. W. %A Hol, C. W. J. %A Bosgra, O. H. %D 2005 %J J. Dyn. Sys., Meas., Control %K imng peerReviewed %P 204 - 215 %T Nominal and robust feedforward design with time domain constraints applied to a wafer stage %U https://doi.org/10.1115/1.2192821 %V 128(2)

@article{GelWal05, added-at = {2021-12-07T20:40:52.000+0100}, author = {de Gelder, E. and van de Wal, M. and Scherer, C. W. and Hol, C. W. J. and Bosgra, O. H.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/28d9696c00107bc0550e4f97701dfb199/carsten.scherer}, endnotereftype = {Journal Article}, interhash = {330c417dc40a360ce776aa4cf143b71b}, intrahash = {8d9696c00107bc0550e4f97701dfb199}, journal = {J. Dyn. Sys., Meas., Control}, keywords = {imng peerReviewed}, pages = {204 - 215}, shorttitle = {Nominal and robust feedforward design with time domain constraints applied to a wafer stage}, timestamp = {2021-12-07T19:40:52.000+0100}, title = {{N}ominal and robust feedforward design with time domain constraints applied to a wafer stage}, url = {https://doi.org/10.1115/1.2192821}, volume = {128(2)}, year = 2005 }