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%0 Journal Article
%1 GelWal05
%A de Gelder, E.
%A van de Wal, M.
%A Scherer, C. W.
%A Hol, C. W. J.
%A Bosgra, O. H.
%D 2005
%J J. Dyn. Sys., Meas., Control
%K
%P 204 - 215
%T Nominal and robust feedforward design with time domain constraints applied to a wafer stage
%U https://doi.org/10.1115/1.2192821
%V 128(2)
@article{GelWal05,
added-at = {2024-03-12T10:23:49.000+0100},
author = {de Gelder, E. and van de Wal, M. and Scherer, C. W. and Hol, C. W. J. and Bosgra, O. H.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/28d9696c00107bc0550e4f97701dfb199/mst},
endnotereftype = {Journal Article},
interhash = {330c417dc40a360ce776aa4cf143b71b},
intrahash = {8d9696c00107bc0550e4f97701dfb199},
journal = {J. Dyn. Sys., Meas., Control},
keywords = {},
pages = {204 - 215},
shorttitle = {Nominal and robust feedforward design with time domain constraints applied to a wafer stage},
timestamp = {2024-03-12T10:23:49.000+0100},
title = {{N}ominal and robust feedforward design with time domain constraints applied to a wafer stage},
url = {https://doi.org/10.1115/1.2192821},
volume = {128(2)},
year = 2005
}