%0 Conference Paper %1 binz-idadfms2004 %A Binz, Hansgeorg %A Watty, Robert %A Kück, H. %A Warkentin, D. %A Benz, D. %B Eurosensensors XVIII %D 2004 %K 2004 IKTD KT Tagungsbeitrag %T Improved Design And Development For MEMS Sensors

@inproceedings{binz-idadfms2004, added-at = {2019-02-26T09:47:21.000+0100}, author = {Binz, Hansgeorg and Watty, Robert and Kück, H. and Warkentin, D. and Benz, D.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e418a403de12f948a4c5ed8ead3a3056/iktd_group}, booktitle = {Eurosensensors XVIII}, eventtitle = {Eurosensensors XVIII}, interhash = {120a25236d7c83141a3e4099a7b335b2}, intrahash = {e418a403de12f948a4c5ed8ead3a3056}, keywords = {2004 IKTD KT Tagungsbeitrag}, language = {english}, timestamp = {2019-10-01T12:31:54.000+0200}, title = {Improved Design And Development For MEMS Sensors}, year = 2004 }