%0 Journal Article %1 Hügel.1998.Structuring %A Hügel, Helmut %A Schittenhelm, Henrik %A Jasper, Knut %A Callies, Gert %A Berger, Peter %D 1998 %J Journal of Laser Applications %K Modelling Laser Diagnostics LaserMatterInteraction from:peterberger Peer Simulation %N 6 %P 255 %T Structuring with excimer lasers-experimental and theoretical investigations on quality and efficiency %V 10

@article{Hügel.1998.Structuring, added-at = {2017-12-21T13:34:45.000+0100}, author = {Hügel, Helmut and Schittenhelm, Henrik and Jasper, Knut and Callies, Gert and Berger, Peter}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cf94b313b5149ee45fe88049de1c4a65/ifsw}, interhash = {0bf79da61371441bb78b72809e485d1c}, intrahash = {cf94b313b5149ee45fe88049de1c4a65}, journal = {Journal of Laser Applications}, keywords = {Modelling Laser Diagnostics LaserMatterInteraction from:peterberger Peer Simulation}, number = 6, pages = 255, timestamp = {2017-12-21T12:34:45.000+0100}, title = {Structuring with excimer lasers-experimental and theoretical investigations on quality and efficiency }, volume = 10, year = 1998 }