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%0 Journal Article
%1 Hügel.1998.Structuring
%A Hügel, Helmut
%A Schittenhelm, Henrik
%A Jasper, Knut
%A Callies, Gert
%A Berger, Peter
%D 1998
%J Journal of Laser Applications
%K Modelling Laser Diagnostics LaserMatterInteraction from:peterberger Peer Simulation
%N 6
%P 255
%T Structuring with excimer lasers-experimental and theoretical investigations on quality and efficiency
%V 10
@article{Hügel.1998.Structuring,
added-at = {2017-12-21T13:34:45.000+0100},
author = {Hügel, Helmut and Schittenhelm, Henrik and Jasper, Knut and Callies, Gert and Berger, Peter},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2cf94b313b5149ee45fe88049de1c4a65/ifsw},
interhash = {0bf79da61371441bb78b72809e485d1c},
intrahash = {cf94b313b5149ee45fe88049de1c4a65},
journal = {Journal of Laser Applications},
keywords = {Modelling Laser Diagnostics LaserMatterInteraction from:peterberger Peer Simulation},
number = 6,
pages = 255,
timestamp = {2017-12-21T12:34:45.000+0100},
title = {Structuring with excimer lasers-experimental and theoretical investigations on quality and efficiency },
volume = 10,
year = 1998
}
