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%0 Journal Article
%1 article
%A Körner, Klaus
%A Ruprecht, Aiko
%A Wiesendanger, Tobias
%D 2004
%J Proceedings of SPIE - The International Society for Optical Engineering
%K 3dm ito reviewed
%R 10.1117/12.554754
%T New approaches in depth-scanning optical metrology
%V 5457
@article{article,
added-at = {2019-05-08T13:31:33.000+0200},
author = {Körner, Klaus and Ruprecht, Aiko and Wiesendanger, Tobias},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/26efea38e2de5e247c7372b9121f426cd/heidrunkempf},
doi = {10.1117/12.554754},
interhash = {096b0925c8acac52308e0abe179d8929},
intrahash = {6efea38e2de5e247c7372b9121f426cd},
journal = {Proceedings of SPIE - The International Society for Optical Engineering},
keywords = {3dm ito reviewed},
month = {09},
timestamp = {2019-05-08T11:31:33.000+0200},
title = {New approaches in depth-scanning optical metrology},
volume = 5457,
year = 2004
}
