F. Burger, U. KEßler, M. Schober, W. Eberhardt, T. Groezinger, and H. Kueck. Smart systems integration 2011 / 5th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components, Dresden, Germany, 22 - 23 March 2011, (March 2011)
W. Eberhardt, V. Mayer, S. Weser, H. Willeck, A. Fischer, and H. Kueck. Smart systems integration 2010 / 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components, Como, Italy, 23 - 24 March 2010, (March 2010)