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  3. diffraction algorithm

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    3Theoretical investigation on the elimination of the period chirp by deliberate substrate deformations
     

    F. Bienert, T. Graf, and M. Abdou Ahmed. Optics Express, 30 (13): 22410 (June 2022)
    3 years ago by @florianbienert
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      LILalgorithmchirpdiffractiondiffraction_gratinggratinginterferenceinterference_lithographymyownpeertherory
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