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Surface micromachined RF MEMS variable capacitor., , , , and . Microelectronics Journal, 38 (8-9): 855-859 (2007)Spiral capacitor based on copper electroplating., , , , and . NEMS, page 432-435. IEEE Computer Society, (2009)High performance MEMS spiral inductors., , , , , and . NEMS, page 1033-1035. IEEE, (2010)Fabrication and characteristics of tunable band pass filter using MetalMumps technology., , , , , and . NEMS, page 249-253. IEEE, (2011)Electrodeposition and characterization of CoNiMnP-based permanent magnetic film for MEMS applications., , , and . NEMS, page 367-371. IEEE, (2011)Tunable MEMS capacitors considering deformation factor., , and . NEMS, page 25-28. IEEE Computer Society, (2009)Fabrication and performance of a micromachined 3-D solenoid inductor., , , and . Microelectronics Journal, 37 (9): 948-951 (2006)Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors., , , , , and . Sensors, 12 (4): 5105-5115 (2012)Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology., , , , , and . Microelectronics Journal, 38 (1): 120-124 (2007)Electrodeposition of CoNiMnP-based permanent magnetic film., , , and . NEMS, page 883-886. IEEE, (2010)