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Chromatic confocal spectral interferometry for technical surface characterization

, , , and . Optical Inspection and …, (2009)11 cites: https://scholar.google.com/scholar?cites=16198342556063896427&as_sdt=2005&sciodt=0,5&hl=en.

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Optical metrology for process control: modeling and simulation of sensors for a comparison of different measurement principles, , , and . Optical Micro- and Nanometrology III, SPIE, (April 2010)Chromatic confocal spectral interferometry for technical surface characterization, , , and . Optical Inspection and …, (2009)11 cites: https://scholar.google.com/scholar?cites=16198342556063896427&as_sdt=2005&sciodt=0,5&hl=en.Modeling and simulation of a chromatic-confcal sensor to measure rough surfaces, , , and . DGaO Proceedings, (2009)4 cites: https://scholar.google.com/scholar?cites=16419362578584721445&as_sdt=2005&sciodt=0,5&hl=en.