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Control of MEMS Vibration Modes With Pulsed Digital Oscillators - Part II: Simulation and Experimental Results.

, , , , , , , , and . IEEE Trans. on Circuits and Systems, 57-I (8): 1879-1890 (2010)

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Control of MEMS Vibration Modes With Pulsed Digital Oscillators: Part I - Theory., , , , and . IEEE Trans. on Circuits and Systems, 57-I (8): 1865-1878 (2010)Influence of the Feedback Filter on the Response of the Pulsed Digital Oscillator, , , , and . CoRR, (2007)Tracking Control System Using an Incident Radiation Angle Microsensor., , , , , , , and . IEEE Trans. Industrial Electronics, 54 (2): 1207-1216 (2007)Resolution Limits for Resonant Mems Sensors Based on Discrete Relay Feedback Techniques, , , , and . CoRR, (2007)Experiments on the Release of CMOS-Micromachined Metal Layers., , and . J. Sensors, (2010)Control of MEMS Vibration Modes With Pulsed Digital Oscillators - Part II: Simulation and Experimental Results., , , , , , , , and . IEEE Trans. on Circuits and Systems, 57-I (8): 1879-1890 (2010)On some properties of the output of a pulsed digital oscillator working with multiple resonances., , , and . ISCAS, page 1320-1323. IEEE, (2010)Application of Pulsed Digital Oscillators in 'reverse mode' to eliminate undesired vibrations in high-Q MEMS resonators., , and . ISCAS, page 925-928. IEEE, (2007)Analysis of the Σ-Δ pulsed digital oscillator for MEMS., , , , , and . IEEE Trans. on Circuits and Systems, 52-I (11): 2286-2297 (2005)General Dynamics of Pulsed Digital Oscillators., , and . IEEE Trans. on Circuits and Systems, 55-I (7): 2038-2050 (2008)