Author of the publication

A novel acceleration switch with hat-like contact separated from proof mass.

, , , , , , and . NEMS, page 221-224. IEEE, (2011)

Please choose a person to relate this publication to

To differ between persons with the same name, the academic degree and the title of an important publication will be displayed. You can also use the button next to the name to display some publications already assigned to the person.

 

Other publications of authors with the same name

Fabrication and testing of a novel silicon probe for micromachined surface profilers., , , , and . NEMS, page 406-409. IEEE, (2011)A temperature control system used for improving resonant frequency drift of MEMS gyroscopes., , , , , and . NEMS, page 397-400. IEEE, (2015)A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer., , , , , , and . NEMS, page 421-425. IEEE, (2015)Residual stress characterization of GaN microstructures using bent-beam strain sensors., , , , , and . NEMS, page 138-140. IEEE, (2010)A Low-Noise High-G Closed-Loop Capacitive Accelerometer Using DC-Blocking Technique for Reduction of Power Dissipation., , , , , and . ISCAS, page 1-5. IEEE, (2018)MEMS gyroscope control system using a band-pass continuous-time sigma-delta modulator., , , , and . SCIENCE CHINA Information Sciences, 56 (10): 1-10 (2013)Designing of a micromachined gyroscope system with a closed-loop DC biased interface ASIC., , , , , and . SCIENCE CHINA Information Sciences, 57 (10): 1-13 (2014)A CMOS compatible process for monolithic integration of high-aspect-ratio bulk silicon microstructures., , and . SCIENCE CHINA Information Sciences, 57 (8): 1-7 (2014)A capacitive readout circuit with DC sensing method for micromachined gyroscopes., , , , and . NEMS, page 712-715. IEEE, (2012)A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors., , and . NEMS, page 583-586. IEEE, (2012)