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Hybrid micromachined push-button switches

, , and . Electrical contacts - 2003 : proceedings of the Forty-Ninth IEEE Holm Conference on Electrical Contacts, page 219-222. Piscataway, NJ, IEEE Operations Center, (2003)

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Local Laser Bonding for low Temperature Budget, , , , , and . Selected papers from Transducers '01 Eurosensors XV, 97/98, page 422-427. Amsterdam, Elsevier, (2002)New micromachined membrane switches in silicon technology, , , , , and . Electrical contacts - 2001 : proceedings of the Forty-Seventh IEEE Holm Conference on Electrical Contacts, page 117-121. Piscataway, NJ, IEEE Operations Center, (2001)Hybrid micromachined push-button switches, , and . Electrical contacts - 2003 : proceedings of the Forty-Ninth IEEE Holm Conference on Electrical Contacts, page 219-222. Piscataway, NJ, IEEE Operations Center, (2003)New micromachined membrane switches in silicon technology, , , , , and . IEEE transactions on components and packaging technologies, 25 (3): 397-401 (2002)