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Ultrathin wafer handling in 3D Stacked IC manufacturing combining a novel ZoneBOND™ temporary bonding process with room temperature peel debonding., , , , , , , , , and 6 other author(s). 3DIC, page 1-4. IEEE, (2011)Cost effectiveness of 3D integration options., , and . 3DIC, page 1-6. IEEE, (2010)Direct gold and copper wires bonding on copper., , , , , and . Microelectronics Reliability, 43 (6): 913-923 (2003)TSV process-induced MOS reliability degradation., , , , , , and . IRPS, page 5. IEEE, (2018)Stress mitigation of 3D-stacking/packaging induced stresses., , , , , , , , and . IRPS, page 4. IEEE, (2018)Wafer-level package interconnect options., , , , , , and . IEEE Trans. VLSI Syst., 14 (6): 654-659 (2006)Reliability Challenges Related to TSV Integration and 3-D Stacking., , , , , , , , and . IEEE Design & Test, 33 (3): 37-45 (2016)Enhanced Cu pillar design to reduce thermomechanical stress induced during flip chip assembly., , , and . Microelectronics Reliability, (2018)Package level interconnect options., , , , , , and . SLIP, page 21-27. ACM, (2005)Comparative study of 3D stacked IC and 3D interposer integration: Processing and assembly challenges., , , , , , , and . 3DIC, page 1-7. IEEE, (2014)