Porous Silicon For Micro- And Optoelectronic Applications: Fabrication Technology And Post-Processing Steps
E. Angelopoulos, S. Ferwana, C. Harendt, M. Zimmermann, E. Penteker, and J. Burghartz. Proceedings : SAFE 2008, ProRISC 2008 : 11th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors : 19th Annual Workshop on Circuits, Systems and Signal Processing : November 27 - 28, 2008, Veldhoven, The Netherlands, page 445-448. Utrecht, STW, (2008)
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