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Emerging simulation approaches for micromachined devices.

, , , and . IEEE Trans. on CAD of Integrated Circuits and Systems, 19 (12): 1572-1589 (2000)

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Design of a modular tactile sensor and actuator based on an electrorheological gel., , and . ICRA, page 13-17. IEEE, (1996)Emerging simulation approaches for micromachined devices., , , and . IEEE Trans. on CAD of Integrated Circuits and Systems, 19 (12): 1572-1589 (2000)Paper generators: harvesting energy from touching, rubbing and sliding., , , and . UIST, page 23-30. ACM, (2013)Enhancing CMOS Using Nanoelectronic Devices: A Perspective on Hybrid Integrated Systems., , , , , and . Proceedings of the IEEE, 98 (12): 2061-2075 (2010)RF-CMOS-MEMS based frequency-reconfigurable amplifiers., and . CICC, page 81-84. IEEE, (2009)Electrostatic latching for inter-module adhesion, power transfer, and communication in modular robots., , , , , and . IROS, page 2779-2786. IEEE, (2007)Statistical design and optimization for adaptive post-silicon tuning of MEMS filters., , , , , , , and . DAC, page 176-181. ACM, (2012)Path toward future CAD environments for MEMS (tutorial abstract)., , and . ICCAD, page 606. IEEE Computer Society, (1999)A High Dynamic Range CMOS-MEMS Accelerometer Array with Drift Compensation and Fine-Grain Offset Compensation., , , , , and . CICC, page 1-4. IEEE, (2019)Parylene neural probe with embedded CMOS multiplexing amplifier., and . EMBC, page 3374-3377. IEEE, (2018)