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Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimization

, , , , and . Sensors and Actuators. A, Physical, 74 (1): 190-192 (1999)
DOI: 10.1016/S0924-4247(98)00336-7

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Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimization, , , , and . Fachtagung numerische Simulation in Feinwerk-, Mikrotechnik und Elektronik, München, Institut für Technologie- und Wissenstransfer an der Fachhochschule München, (1998)Improved simulation for strongly coupled micro-electro-mechanical systems : resonant vacuum sensor optimization, , , , and . Sensors and Actuators. A, Physical, 74 (1): 190-192 (1999)