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Nondestructive surface profiling of hidden MEMS using an infrared low-coherence interferometric microscope, and . Surface Topography-Metrology And Properties, 6 (1): 015005 (2018)Dense arrays of millimeter-sized glass lenses fabricated at wafer-level, , , , , , , , , and 2 other author(s). Optics express, 23 (9): 11702-11712 (2015)Single-shot low coherence pointwise measuring interferometer with potential for in-line inspection, , , , and . Measurement science and technology, 28 (2): 025009 (2017)Nondestructive surface profiling of hidden MEMS by an infrared low-coherence interferometric microscope, and . Surface Topography: Metrology and Properties, (December 2017)Nondestructive surface profiling of hidden MEMS by an infrared low-coherence interferometric microscope, and . Surface Topography: Metrology and Properties, (2018)Micromachined Phase-Shifted Array-Type Mirau Interferometer for Swept-Source OCT Imaging : Design, Microfabrication and Experimental Validation, , , , , , , , , and 3 other author(s). Biomedical Optics Express, 10 (3): 1111-1125 (2019)Topography measurement on disguised microelectromechanical systems using short coherence interferometry, , and . TM-Technisches Messen, 86 (6): 309-318 (2019)Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances, , , , , , , , , and . Optics letters, 41 (1): 96-99 (2016)Optische Sensoren zur Vermessung technischer und biologischer Objekte auf Basis von Kurzkohärenz-Interferometrie. Universität Stuttgart, Stuttgart, Dissertation, (2021)Inspection of hidden MEMS by an infrared low-coherence interferometric microscope, and . Interferometry XIX, 10749, page 1074911. SPIE, (2018)