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Innovative Concept for the Fabrication of Micromechanical Sensor and Actuator Devices Using Selectively Metallized Polymers

, , , , , and . Transducers '01 Eurosensors XV, page 1600-1603. Berlin, Heidelberg, Springer Berlin Heidelberg, (2001)
DOI: https://doi.org/10.1007/978-3-642-59497-7_378

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