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Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors

H. Schenk, P. Duerr, D. Kunze, H. Lakner, and H. Kueck. MOEMS and Miniaturized Systems, 4178, page 116-125. International Society for Optics and Photonics, SPIE, (2000)
DOI: 10.1117/12.396479

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Detlef Clauß University of Stuttgart

Dr. Matthias Künzer University of Stuttgart

Hon. -Prof. Dr. -Ing. Hartwig Michael Künzel University of Stuttgart

Sebastian Künzel University of Stuttgart

Other publications of authors with the same name

An electrostatically excited 2D-micro-scanning-mirror with an in-plane configuration of the driving electrodesH. Schenk, P. Duerr, D. Kunze, H. Lakner, and H. Kueck. Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308), page 473-478. (January 2000)Design and modeling of large deflection micromechanical 1D and 2D scanning mirrorsH. Schenk, P. Duerr, D. Kunze, H. Lakner, and H. Kueck. MOEMS and Miniaturized Systems, 4178, page 116-125. International Society for Optics and Photonics, SPIE, (2000)Large deflection micromechanical scanning mirrors for linear scans and pattern generationH. Schenk, P. Duerr, T. Haase, D. Kunze, U. Sobe, H. Lakner, and H. Kueck. IEEE Journal of Selected Topics in Quantum Electronics, 6 (5): 715-722 (2000)