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Real-time feedback control of reactive ion etching using neural networks.

, , and . ICNN, page 2039-2043. IEEE, (1996)

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Defect prediction for reactive ion etching using neural networks., , , and . ICNN, page 169-173. IEEE, (1997)Celebrating the 95th birthday of Professor Karl S. Pister : Part 1 - Biography and tributes, , , , , , , , , and 9 other author(s). Computer modeling in engineering & sciences, 129 (3): 1077-1122 (2021)Real-time feedback control of reactive ion etching using neural networks., , and . ICNN, page 2039-2043. IEEE, (1996)A comparison of genetic and particle swarm optimization for contact formation in high-performance silicon solar cells., , , and . IJCNN, page 1531-1535. IEEE, (2008)Microfabrication, assembly, and hermetic packaging of mm-sized free-floating neural probes., , , , , , and . BioCAS, page 1-4. IEEE, (2017)Optimization of Neural Network Structure and Learning Parameters Using Genetic Algorithms., and . ICTAI, page 200-206. IEEE Computer Society, (1996)Neural-Network-Based Sensor Fusion of Optical Emission and Mass Spectroscopy Data for Real-Time Fault Detection in Reactive Ion Etching., and . IEEE Trans. Industrial Electronics, 52 (4): 1063-1072 (2005)Characterization and Optimization of the Contact Formation for High-Performance Silicon Solar Cells., , , , , , and . ISNN (3), volume 4493 of Lecture Notes in Computer Science, page 246-251. Springer, (2007)Optimization of silicon solar cell fabrication based on neural network and genetic programming modeling., , , , , , and . Soft Comput., 14 (2): 161-169 (2010)Silicon interposer platform with low-loss through-silicon vias using air., , and . 3DIC, page TS11.3.1-TS11.3.4. IEEE, (2015)