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Disambiguation of "Buchaillot, Lionel"

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Optimization of SiNX: H films deposited by PECVD for reliability of electronic, microsystems and optical applications.

, , , , and . Microelectron. Reliab., 50 (8): 1103-1106 (2010)

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Electrostatical coupling-spring for micro-mechanical filtering applications., , , , and . ISCAS (3), page 530-533. IEEE, (2003)Silicon on Nothing Mems Electromechanical Resonator, , , , , , , , , and . CoRR, (2008)Ultra-Sensitive Capacitive Detection Based on SGMOSFET Compatible With Front-End CMOS Process., , , , , , , , , and 1 other author(s). J. Solid-State Circuits, 44 (1): 247-257 (2009)Thermal and electrostatic reliability characterization in RF MEMS switches., , , , , , , and . Microelectronics Reliability, 45 (9-11): 1790-1793 (2005)Feedback of MEMS reliability study on the design stage: a step toward Reliability Aided Design (RAD).. Microelectronics Reliability, 43 (9-11): 1919-1928 (2003)Reliability of polysilicon microstructures: in situ test benches., , and . Microelectronics Reliability, 42 (9-11): 1795-1800 (2002)Design of an autonomous micro robot., , , and . ETFA (2), page 795-798. IEEE, (2001)0-7803-7241-7.Experiments on micronmanipulation using adhesion forces in unconstrained environment., , , , , and . IROS, page 653-658. IEEE, (2000)Optimization of SiNX: H films deposited by PECVD for reliability of electronic, microsystems and optical applications., , , , and . Microelectron. Reliab., 50 (8): 1103-1106 (2010)A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications, , , , and . CoRR, (2008)