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A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection.

X. Shi, Y. Lu, B. Xie, Y. Li, J. Wang, D. Chen, and J. Chen. Sensors, 18 (8): 2494 (2018)

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Micro-machined resonant accelerometer with high sensitivity.J. Wang, Y. Shang, S. Tu, L. Liu, and D. Chen. NEMS, page 527-530. IEEE, (2011)A novel micro-machined biosensor with resonant torsional paddle for direct detection in liquid.J. Wang, H. Li, X. Li, and D. Chen. NEMS, page 531-534. IEEE, (2011)An electrostatically-driven and capacitively-sensed differential lateral resonant pressure microsensor.B. Xie, H. Jiao, J. Wang, D. Chen, and J. Chen. NEMS, page 1271-1274. IEEE, (2013)Classification of Cells with Membrane Staining and/or Fixation Based on Cellular Specific Membrane Capacitance and Cytoplasm Conductivity.S. Huang, Y. Zhao, D. Chen, S. Liu, Y. Luo, T. Chiu, J. Wang, J. Chen, and M. Wu. Micromachines, 6 (2): 163-171 (2015)A Lateral Differential Resonant Pressure Microsensor Based on SOI-Glass Wafer-Level Vacuum Packaging.B. Xie, Y. Xing, Y. Wang, J. Chen, D. Chen, and J. Wang. Sensors, 15 (9): 24257-24268 (2015)A Flexible Sensing Unit Manufacturing Method of Electrochemical Seismic Sensor.G. Li, Z. Sun, J. Wang, D. Chen, J. Chen, L. Chen, C. Xu, W. Qi, and Y. Zheng. Sensors, 18 (4): 1165 (2018)A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection.X. Shi, Y. Lu, B. Xie, Y. Li, J. Wang, D. Chen, and J. Chen. Sensors, 18 (8): 2494 (2018)A Monolithic Electrochemical Micro Seismic Sensor Capable of Monitoring Three-Dimensional Vibrations.L. Chen, Z. Sun, G. Li, D. Chen, J. Wang, and J. Chen. Sensors, 18 (4): 1047 (2018)An Electromagnetically Excited Silicon Nitride Beam Resonant Accelerometer.D. Chen, Z. Wu, L. Liu, X. Shi, and J. Wang. Sensors, 9 (3): 1330-1338 (2009)A microfluidic system enabling continuous characterization of single-cell specific membrane capacitance and cytoplasm conductivity.Y. Zhao, D. Chen, H. Li, Y. Luo, B. Deng, S. Huang, T. Chiu, M. Wu, R. Long, J. Wang and 1 other author(s). NEMS, page 344-347. IEEE, (2013)

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Disambiguation of "Chen, Deyong"

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A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection.

Please choose a person to relate this publication to

Jun Chen University of Stuttgart

Hong Chen University of Stuttgart

Yiyin Chen University of Stuttgart

Lu Chen University of Stuttgart

Yingxing Cheng University of Stuttgart

Other publications of authors with the same name

Disambiguation

PUMA

Disambiguation of "Chen, Deyong"

copydeleteadd this publication to your clipboardcommunity posthistory of this postURLDOIBibTeXEndNoteAPAChicagoDIN 1505HarvardMSOffice XML A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection.

Please choose a person to relate this publication to

Jun Chen University of Stuttgart

Hong Chen University of Stuttgart

Yiyin Chen University of Stuttgart

Lu Chen University of Stuttgart

Yingxing Cheng University of Stuttgart

Other publications of authors with the same name

Disambiguation

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URL
DOI
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Chicago
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A Resonant Pressure Microsensor Based on Double-Ended Tuning Fork and Electrostatic Excitation/Piezoresistive Detection.