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Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer.

, , , and . Sensors, 22 (3): 872 (2022)

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Novel Three-Dimensional Beam Tracking System for Stationary-Sample-Type Atomic Force Microscopy., and . IEEE Trans. Instrumentation and Measurement, 55 (5): 1648-1654 (2006)Transforming an Optical Pick-Up-Head Into an Accelerometer With UltraHigh Sensitivity., , , and . IEEE Trans. Instrumentation and Measurement, 63 (3): 687-693 (2014)A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism., , and . IEEE Trans. Ind. Electron., 57 (1): 96-106 (2010)Optoelectronic Angular Displacement Measurement Technology for 2-Dimensional Mirror Galvanometer., , , and . Sensors, 22 (3): 872 (2022)Design and Experiment of a Macro-Micro Planar Maglev Positioning System., , , and . IEEE Trans. Ind. Electron., 59 (11): 4128-4139 (2012)A New Design of 3-DOF Flexure-mechanism Positioner with Electromagnetic Technology., , , , and . CDC, page 603-608. IEEE, (2006)High precision eddy current damped electromagnetic positioner with flexure-suspension., , , and . CCA/ISIC, page 1568-1573. IEEE, (2009)A Piezoelectric Two-Degree-of-Freedom Nanostepping Motor with a Positioning Sensor., and . AIM, page 1143-1147. IEEE, (2018)Measuring the Deflection of the Cantilever in Atomic Force Microscope with an Optical Pickup System., , , and . CDC, page 592-596. IEEE, (2006)