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Design framework for high-performance optimal sampled-data control with application to a wafer stage., , and . Int. J. Control, 80 (6): 919-934 (2007)Exploiting additional actuators and sensors for nano-positioning robust motion control., , , , , and . ACC, page 984-990. IEEE, (2014)Multi-objective H∞ control applied to a wafer stage model., , , and . CDC, page 796-802. IEEE, (2004)Enhancing performance through multivariable weighting function design in ℋ- loop-shaping: with application to a motion system., , , , and . ACC, page 6039-6044. IEEE, (2013)A review of methods for input/output selection., and . Automatica, 37 (4): 487-510 (2001)Optimal actuator shape design with input and state constraints for a wafer heating application., , , , , and . ACC, page 3789-3794. IEEE, (2019)Identification for robust inferential control., , and . CDC, page 2581-2586. IEEE, (2009)Frequency Response Sensitivity model updating using generic parameters., , , , , and . ACC, page 6215-6220. IEEE, (2016)Next-generation wafer stage motion control: Connecting system identification and robust control., , , , , and . ACC, page 2455-2460. IEEE, (2012)Sensor and Actuator Placement for Proportional Feedback Control in Advection-Diffusion Equations., , , , , and . IEEE Control. Syst. Lett., 4 (1): 193-198 (2020)