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A Holistic Self-Calibration Approach for Determination of Three-Dimensional Stage Error.

, , , , and . IEEE Trans. Instrumentation and Measurement, 62 (2): 483-494 (2013)

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A novel data-driven controller tuning method for improving convergence performance., , , , and . ACC, page 3230-3235. IEEE, (2015)Integrated direct/indirect adaptive robust control of a class of nonlinear systems preceded by unknown dead-zone nonlinearity., , and . CDC, page 6626-6631. IEEE, (2009)LFT Structured Uncertainty Modeling and Robust Loop-Shaping Controller Optimization for an Ultraprecision Positioning Stage., , , , , and . IEEE Trans. Industrial Electronics, 61 (12): 7013-7025 (2014)Adaptive Robust Repetitive Control of an Industrial Biaxial Precision Gantry for Contouring Tasks., , , and . IEEE Trans. Contr. Sys. Techn., 19 (6): 1559-1568 (2011)Newton-ILC Contouring Error Estimation and Coordinated Motion Control for Precision Multiaxis Systems With Comparative Experiments., , , , , and . IEEE Trans. Industrial Electronics, 65 (2): 1470-1480 (2018)Performance-Oriented Precision LARC Tracking Motion Control of a Magnetically Levitated Planar Motor With Comparative Experiments., , , , and . IEEE Trans. Industrial Electronics, 63 (9): 5763-5773 (2016)A Novel Electrodynamic Reaction Sphere Prototype for Spacecraft Attitude Control., , , , , , , , and . IEEE Trans. Industrial Electronics, 67 (5): 3879-3890 (2020)State/Model-Free Variable-Gain Discrete Sliding Mode Control for an Ultraprecision Wafer Stage., , , , and . IEEE Trans. Industrial Electronics, 64 (8): 6695-6705 (2017)Data-Based Switching Feedforward Control for Repeating and Varying Tasks: With Application to an Ultraprecision Wafer Stage., , , , and . IEEE Trans. Industrial Electronics, 66 (11): 8670-8680 (2019)Model-Data Driven Learning Adaptive Robust Control of Precision Mechatronic Motion Systems With Comparative Experiments., , , , and . IEEE Access, (2018)