%0 Conference Paper %1 wanitzek2022gesnonsi %A Wanitzek, Maurice %A Oehme, Michael %A Spieth, Christian %A Schwarz, Daniel %A Seidel, Lukas %A Schulze, Jörg %B ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC) %D 2022 %K iht professional_meetings %P 169-172 %R 10.1109/ESSCIRC55480.2022.9911363 %T GeSn-on-Si Avalanche Photodiodes for Short-Wave Infrared Detection %X In this work, we report the growth, fabrication, and characterization of GeSn-on-Si Avalanche Photodiodes with a Sn concentration of up to 2.2%. The Ge1-xSnx absorption layer was grown at a very low temperature of 200°C by using molecular beam epitaxy. We show record low dark currents limited by a perimeter leakage path, only and therefore not influenced by the Sn concentration, while the absorption for a wavelength of 1,550 nm increases significantly.

@inproceedings{wanitzek2022gesnonsi, abstract = {In this work, we report the growth, fabrication, and characterization of GeSn-on-Si Avalanche Photodiodes with a Sn concentration of up to 2.2%. The Ge1-xSnx absorption layer was grown at a very low temperature of 200°C by using molecular beam epitaxy. We show record low dark currents limited by a perimeter leakage path, only and therefore not influenced by the Sn concentration, while the absorption for a wavelength of 1,550 nm increases significantly.}, added-at = {2023-01-12T10:59:04.000+0100}, author = {Wanitzek, Maurice and Oehme, Michael and Spieth, Christian and Schwarz, Daniel and Seidel, Lukas and Schulze, Jörg}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2bae41d655870993d6a7ffbb8695e678c/ihtpublikation}, booktitle = {ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC)}, description = {GeSn-on-Si Avalanche Photodiodes for Short-Wave Infrared Detection | IEEE Conference Publication | IEEE Xplore}, doi = {10.1109/ESSCIRC55480.2022.9911363}, interhash = {fd047b96e64231eded0e206fcda80928}, intrahash = {bae41d655870993d6a7ffbb8695e678c}, keywords = {iht professional_meetings}, month = {Sep.}, pages = {169-172}, timestamp = {2023-01-12T09:59:04.000+0100}, title = {GeSn-on-Si Avalanche Photodiodes for Short-Wave Infrared Detection}, year = 2022 }