Spin, Spray and Eloctroplating of Photoresist for MEMS Structures : A Comparison
N. Pham, E. Boellaard, P. Sarro, and J. Burghartz. 2002 proceedings : SAFE-ProRISC-SeSens, November 27 - 29, 2002, Veldhoven, the Netherlands, page 81-86. (2002)
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%0 Conference Paper
%1 pham2002spray
%A Pham, Nga Phuong
%A Boellaard, E.
%A Sarro, Pasqualina M.
%A Burghartz, Joachim N.
%B 2002 proceedings : SAFE-ProRISC-SeSens, November 27 - 29, 2002, Veldhoven, the Netherlands
%D 2002
%K INES firstnamemissing
%P 81-86
%T Spin, Spray and Eloctroplating of Photoresist for MEMS Structures : A Comparison
%@ 90-73461-33-2
@inproceedings{pham2002spray,
added-at = {2019-04-03T15:29:42.000+0200},
author = {Pham, Nga Phuong and Boellaard, E. and Sarro, Pasqualina M. and Burghartz, Joachim N.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2bf993c097124ff2b97eca7a9d59f3b68/kevin.konnerth},
booktitle = {2002 proceedings : SAFE-ProRISC-SeSens, November 27 - 29, 2002, Veldhoven, the Netherlands},
eventdate = {2002-11-27/2002-11-29},
eventtitle = {SAFE-ProRISC-SeSens},
interhash = {f5b74e3fe75c8e53e29f748f172c93fb},
intrahash = {bf993c097124ff2b97eca7a9d59f3b68},
isbn = {90-73461-33-2},
keywords = {INES firstnamemissing},
pages = {81-86},
timestamp = {2019-04-03T13:57:12.000+0200},
title = {Spin, Spray and Eloctroplating of Photoresist for MEMS Structures : A Comparison},
venue = {Veldhoven, The Netherlands},
year = 2002
}
