%0 Journal Article %1 boettcher2017multilayer %A Boettcher, Tobias %A Gronle, Marc %A Osten, Wolfgang %D 2017 %I Optical Society of America %J Optics express %K %N 9 %P 10204-10213 %R 10.1364/OE.25.010204 %T Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT) %V 25

@article{boettcher2017multilayer, added-at = {2023-08-31T16:19:47.000+0200}, affiliation = {Boettcher, T (Reprint Author), Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany. Boettcher, T.; Gronle, M.; Osten, W., Univ Stuttgart, Inst Tech Opt, Pfaffenwaldring 9, D-70569 Stuttgart, Germany.}, author = {Boettcher, Tobias and Gronle, Marc and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2dd169ff5bcdf0fe827888c6a230515c8/puma-wartung}, doi = {10.1364/OE.25.010204}, interhash = {dfa5c7b51b16b4501632e346179337ea}, intrahash = {dd169ff5bcdf0fe827888c6a230515c8}, issn = {1094-4087}, journal = {Optics express}, keywords = {}, language = {eng}, number = 9, pages = {10204-10213}, publisher = {Optical Society of America}, research-areas = {Optics}, timestamp = {2023-08-31T14:19:47.000+0200}, title = {Multi-layer topography measurement using a new hybrid single-shot technique: Chromatic Confocal Coherence Tomography (CCCT)}, unique-id = {ISI:000400665800063}, volume = 25, year = 2017 }