%0 Thesis %1 pauly2024modellierung %A Pauly, Steffen %C Stuttgart %D 2024 %K %R 10.18419/opus-14909 %T Modellierung und Diagnostik einer Remote-Mikrowellen-Plasmaquelle zum Hochrateätzen

@phdthesis{pauly2024modellierung, added-at = {2024-10-01T17:54:21.000+0200}, address = {Stuttgart}, author = {Pauly, Steffen}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/21199480580ad98782c1f7fd77055b5f0/unibiblio-3}, doi = {10.18419/opus-14909}, eventdate = {2024-04-17}, interhash = {dd313378f955bb2862c6c3a7b45d1c4b}, intrahash = {1199480580ad98782c1f7fd77055b5f0}, keywords = {}, language = {ger}, school = {Universität Stuttgart}, supervisor = {Tovar, Günter}, supervisorgnd = {105681781X}, timestamp = {2024-10-01T15:54:21.000+0200}, title = {Modellierung und Diagnostik einer Remote-Mikrowellen-Plasmaquelle zum Hochrateätzen}, type = {Dissertation}, year = 2024 }