%0 Thesis %1 utermohlen2015modeling %A Utermöhlen, Fabian %B Berichte aus der Mikrosystemtechnik %C Aachen %D 2015 %I Shaker %K %T Modeling of MEMS microbolometers : a physics-based scalable compact model %@ 978-3-8440-3565-0

@phdthesis{utermohlen2015modeling, added-at = {2023-08-31T16:23:59.000+0200}, address = {Aachen}, author = {Utermöhlen, Fabian}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2c8fd2f44cd14a625283ba7ed3a9a8f4f/puma-wartung}, eventdate = {2015-03-17}, interhash = {d1f137fffdd21c73f36eb230b28685a4}, intrahash = {c8fd2f44cd14a625283ba7ed3a9a8f4f}, isbn = {978-3-8440-3565-0}, keywords = {}, language = {eng}, publisher = {Shaker}, school = {Universität Stuttgart}, series = {Berichte aus der Mikrosystemtechnik}, supervisor = {Burghartz, Joachim}, supervisorgnd = {102992970X}, timestamp = {2023-08-31T14:23:59.000+0200}, title = {Modeling of MEMS microbolometers : a physics-based scalable compact model}, type = {Dissertation}, year = 2015 }