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%0 Conference Paper
%1 merli2015hochratebascheidung
%A Merli, Stefan
%A Schulz, Andreas
%A Walker, Matthias
%A Stroth, Ulrich
%A Hirth, Thomas
%D 2015
%K
%T Hochratebascheidung von SiOx-Schichten mit Mikrowellen-PECVD
@inproceedings{merli2015hochratebascheidung,
added-at = {2023-08-31T16:15:27.000+0200},
author = {Merli, Stefan and Schulz, Andreas and Walker, Matthias and Stroth, Ulrich and Hirth, Thomas},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/240e9098fdb1e182968afa1b9368a7c7c/puma-wartung},
eventdate = {2015-06-15/2015-06-16},
eventtitle = {16. Wörlitzer Workshop "Isolations- und Barriereschichten für funktionelle Anwendungen"},
howpublished = {Präsentation},
interhash = {ccfbfe7967ae2f994c0cec7aebfe8482},
intrahash = {40e9098fdb1e182968afa1b9368a7c7c},
keywords = {},
language = {ger},
timestamp = {2023-08-31T14:15:27.000+0200},
title = {Hochratebascheidung von SiOx-Schichten mit Mikrowellen-PECVD},
venue = {Oranienbaum-Wörlitz},
year = 2015
}
