%0 Thesis %1 jurisch2017ablenksysteme %A Jurisch, Michael %C Stuttgart %D 2017 %K %R 10.18419/opus-9198 %T Ablenk-Systeme für die Multi-Elektronenstrahllithografie auf Basis CMOS-kompatibler Fertigungsprozesse

@phdthesis{jurisch2017ablenksysteme, added-at = {2023-08-31T16:38:40.000+0200}, address = {Stuttgart}, author = {Jurisch, Michael}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/282a6d39093afbf7cfb6703f764663835/puma-wartung}, doi = {10.18419/opus-9198}, eventdate = {2017-05-29}, interhash = {c4085d5de5f20779b218fe969b398376}, intrahash = {82a6d39093afbf7cfb6703f764663835}, keywords = {}, language = {ger}, school = {Universität Stuttgart}, supervisor = {Burghartz, Joachim}, supervisorgnd = {102992970X}, timestamp = {2023-08-31T14:38:40.000+0200}, title = {Ablenk-Systeme für die Multi-Elektronenstrahllithografie auf Basis CMOS-kompatibler Fertigungsprozesse}, type = {Dissertation}, year = 2017 }