%0 Journal Article %1 mayer2024investigating %A Mayer, Wolfram %A Kuhlmann, Burkhard %A Hiller, Tobias %A Balslink, Thorsten %A Kunz, Ulrich %A Zimmermann, André %D 2024 %I IEEE %J IEEE sensors letters %K %N 1 %P 1500104 %R 10.1109/LSENS.2023.3335095 %T Investigating the Effects of Stress on Die Deformation and on Cross-Axis Offset Drift in Mode-Split MEMS Gyroscopes %V 8

@article{mayer2024investigating, added-at = {2024-04-02T12:37:08.000+0200}, affiliation = {Mayer, W (Corresponding Author), Bosch Sensortec GmbH, D-72770 Reutlingen, Germany. Mayer, W (Corresponding Author), Robert Bosch GmbH, D-72770 Reutlingen, Germany. Mayer, W (Corresponding Author), Univ Stuttgart, Inst Micro Integrat IFM, D-70569 Stuttgart, Germany. Mayer, Wolfram; Kuhlmann, Burkhard; Hiller, Tobias; Balslink, Thorsten; Kunz, Ulrich, Bosch Sensortec GmbH, D-72770 Reutlingen, Germany. Mayer, Wolfram; Kuhlmann, Burkhard; Hiller, Tobias; Balslink, Thorsten; Kunz, Ulrich, Robert Bosch GmbH, D-72770 Reutlingen, Germany. Mayer, Wolfram; Zimmermann, Andre, Univ Stuttgart, Inst Micro Integrat IFM, D-70569 Stuttgart, Germany. Zimmermann, Andre, Hahn Schickard, D-70569 Stuttgart, Germany.}, author = {Mayer, Wolfram and Kuhlmann, Burkhard and Hiller, Tobias and Balslink, Thorsten and Kunz, Ulrich and Zimmermann, André}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a519efbf617f9289bce722f3ba3eacb5/unibiblio}, doi = {10.1109/LSENS.2023.3335095}, interhash = {bff8595c0d11b22614627b8a97097cde}, intrahash = {a519efbf617f9289bce722f3ba3eacb5}, issn = {2475-1472}, journal = {IEEE sensors letters}, keywords = {}, language = {eng}, number = 1, pages = 1500104, publisher = {IEEE}, research-areas = {Engineering; Instruments & Instrumentation; Physics}, timestamp = {2024-04-02T10:37:08.000+0200}, title = {Investigating the Effects of Stress on Die Deformation and on Cross-Axis Offset Drift in Mode-Split MEMS Gyroscopes}, unique-id = {WOS:001127702900002}, volume = 8, year = 2024 }