%0 Conference Paper %1 kuhl1990piezoresistive %A Kühl, Karl %A Sandmaier, Hermann %B Transducers '89 : proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III %C Lausanne %D 1990 %I Elsevier Sequoia %K %N 21, 1/3 %P 142-145 %R 10.1016/0924-4247(90)85027-2 %T Piezoresistive low-pressure sensor with high sensitivity and accuracy %V 2 %X A piezoresistive low-pressure sensor featuring a variety of advantages because of its novel design is introduced. The main objective of this development was to realize a sensor with high sensitivity, high overload capacity, and low linearity error. This publication describes the theory for the design of the piezoresisitve low-pressure sensor. In comparison to familiar sensor concepts, the sensor developed for the pressure range of plus minus 10 kPa exhibits excellent properties (sensitivity is equal to 35 mV/V full-scale output and linearity error is equal to 0.05%). The sensor characteristics determined theoretically were by measurements on realized pressure sensors.

@inproceedings{kuhl1990piezoresistive, abstract = {A piezoresistive low-pressure sensor featuring a variety of advantages because of its novel design is introduced. The main objective of this development was to realize a sensor with high sensitivity, high overload capacity, and low linearity error. This publication describes the theory for the design of the piezoresisitve low-pressure sensor. In comparison to familiar sensor concepts, the sensor developed for the pressure range of plus minus 10 kPa exhibits excellent properties (sensitivity is equal to 35 mV/V full-scale output and linearity error is equal to 0.05%). The sensor characteristics determined theoretically were by measurements on realized pressure sensors.}, added-at = {2023-09-01T10:43:04.000+0200}, address = {Lausanne}, author = {Kühl, Karl and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/29a55f397e802fea563d5bc8624addaa9/unibiblio-4}, booktitle = {Transducers '89 : proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III}, doi = {10.1016/0924-4247(90)85027-2}, eventdate = {1989-06-25/1989-06-30}, eventtitle = {5th International Conference on Solid-State Sensors and Actuators and Eurosensors III}, interhash = {9b8df5500b20804fa8844674b0729257}, intrahash = {9a55f397e802fea563d5bc8624addaa9}, keywords = {}, language = {eng}, number = {21, 1/3}, pages = {142-145}, publisher = {Elsevier Sequoia}, series = {Sensors and actuators. A, Physical}, timestamp = {2023-09-01T08:43:04.000+0200}, title = {Piezoresistive low-pressure sensor with high sensitivity and accuracy}, venue = {Montreux, Switzerland}, volume = 2, year = 1990 }