%0 Journal Article %1 10.1117/1.OE.55.12.121722 %A Singh, Alok Kumar %A Pedrini, Giancarlo %A Peng, Xiang %A Osten, Wolfgang %D 2016 %I SPIE %J Optical Engineering %K giancarlo_pedrini ito journal reviewed %N 12 %P 121722 %R 10.1117/1.OE.55.12.121722 %T Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion %U https://doi.org/10.1117/1.OE.55.12.121722 %V 55

@article{10.1117/1.OE.55.12.121722, added-at = {2023-06-26T07:52:18.000+0200}, author = {Singh, Alok Kumar and Pedrini, Giancarlo and Peng, Xiang and Osten, Wolfgang}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e90ff7a76acabfc557f6796b8612c635/ffischer}, doi = {10.1117/1.OE.55.12.121722}, interhash = {d727d622a975ad2ab6822b17ae2de977}, intrahash = {e90ff7a76acabfc557f6796b8612c635}, journal = {Optical Engineering}, keywords = {giancarlo_pedrini ito journal reviewed}, number = 12, pages = 121722, publisher = {SPIE}, timestamp = {2023-08-10T10:17:29.000+0200}, title = {{Nanoscale measurement of in-plane and out-of-plane displacements of microscopic object by sensor fusion}}, url = {https://doi.org/10.1117/1.OE.55.12.121722}, volume = 55, year = 2016 }