%0 Conference Paper
%1 zengerle1993performance
%A Zengerle, Roland
%A Richter, M.
%A Brosinger, F.
%A Richter, A.
%A Sandmaier, Hermann
%B Transducers '93 : digest of technical papers
%C Tokyo
%D 1993
%E Takahashi, Kiyoshi
%I Inst. of Electrical Engineers of Japan
%K fis liste ubs_30119
%P 106-109
%T Performance simulation of microminiaturized membrane pumps
@inproceedings{zengerle1993performance,
added-at = {2023-08-21T15:14:23.000+0200},
address = {Tokyo},
author = {Zengerle, Roland and Richter, M. and Brosinger, F. and Richter, A. and Sandmaier, Hermann},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e4fd04a90de1480ae6cfd2b56c3ec67b/unibiblio-4},
booktitle = {Transducers '93 : digest of technical papers},
editor = {Takahashi, Kiyoshi},
eventdate = {1993-06-07/1993-06-10},
eventtitle = {7th International Conference on Solid State Sensors and Actuators},
interhash = {13389a48ed61470dfb4c3411abddeb6a},
intrahash = {e4fd04a90de1480ae6cfd2b56c3ec67b},
keywords = {fis liste ubs_30119},
language = {eng},
pages = {106-109},
publisher = {Inst. of Electrical Engineers of Japan},
timestamp = {2023-09-01T10:41:40.000+0200},
title = {Performance simulation of microminiaturized membrane pumps},
venue = {Yokohama},
year = 1993
}