%0 Conference Paper %1 zengerle1993performance %A Zengerle, Roland %A Richter, M. %A Brosinger, F. %A Richter, A. %A Sandmaier, Hermann %B Transducers '93 : digest of technical papers %C Tokyo %D 1993 %E Takahashi, Kiyoshi %I Inst. of Electrical Engineers of Japan %K %P 106-109 %T Performance simulation of microminiaturized membrane pumps

@inproceedings{zengerle1993performance, added-at = {2023-09-01T10:41:56.000+0200}, address = {Tokyo}, author = {Zengerle, Roland and Richter, M. and Brosinger, F. and Richter, A. and Sandmaier, Hermann}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2e4fd04a90de1480ae6cfd2b56c3ec67b/unibiblio-4}, booktitle = {Transducers '93 : digest of technical papers}, editor = {Takahashi, Kiyoshi}, eventdate = {1993-06-07/1993-06-10}, eventtitle = {7th International Conference on Solid State Sensors and Actuators}, interhash = {13389a48ed61470dfb4c3411abddeb6a}, intrahash = {e4fd04a90de1480ae6cfd2b56c3ec67b}, keywords = {}, language = {eng}, pages = {106-109}, publisher = {Inst. of Electrical Engineers of Japan}, timestamp = {2023-09-01T08:41:56.000+0200}, title = {Performance simulation of microminiaturized membrane pumps}, venue = {Yokohama}, year = 1993 }