%0 Journal Article %1 entry28 %A Schalberger, P. %A Baur, H. %A Kohlenbecker, S. %A Persidis, E. %A Fruehauf, N. %D 2007 %J ITC'07 in conjunction with SID-Mid Europe Chapter Spring Meeting, January 2007, Rom, Session 3.5, pages 52-55 %K IGM imported %T High quality LTPS CMOS TFTs produced with a five mask process and only one ion implantation step

@article{entry28, added-at = {2018-12-19T17:55:21.000+0100}, author = {Schalberger, P. and Baur, H. and Kohlenbecker, S. and Persidis, E. and Fruehauf, N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2ca21e71933713e39bc33271fceb35c76/pschalberger}, interhash = {d2723cf5474322e234cdd5bfb750c771}, intrahash = {ca21e71933713e39bc33271fceb35c76}, journal = {ITC'07 in conjunction with SID-Mid Europe Chapter Spring Meeting, January 2007, Rom, Session 3.5, pages 52-55}, keywords = {IGM imported}, timestamp = {2018-12-19T16:56:08.000+0100}, title = {High quality LTPS CMOS TFTs produced with a five mask process and only one ion implantation step}, year = 2007 }