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%0 Journal Article
%1 entry28
%A Schalberger, P.
%A Baur, H.
%A Kohlenbecker, S.
%A Persidis, E.
%A Fruehauf, N.
%D 2007
%J ITC'07 in conjunction with SID-Mid Europe Chapter Spring Meeting, January 2007, Rom, Session 3.5, pages 52-55
%K IGM imported
%T High quality LTPS CMOS TFTs produced with a five mask process and only one ion implantation step
@article{entry28,
added-at = {2018-12-19T17:55:21.000+0100},
author = {Schalberger, P. and Baur, H. and Kohlenbecker, S. and Persidis, E. and Fruehauf, N.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2ca21e71933713e39bc33271fceb35c76/pschalberger},
interhash = {d2723cf5474322e234cdd5bfb750c771},
intrahash = {ca21e71933713e39bc33271fceb35c76},
journal = {ITC'07 in conjunction with SID-Mid Europe Chapter Spring Meeting, January 2007, Rom, Session 3.5, pages 52-55},
keywords = {IGM imported},
timestamp = {2018-12-19T16:56:08.000+0100},
title = {High quality LTPS CMOS TFTs produced with a five mask process and only one ion implantation step},
year = 2007
}