%0 Journal Article
%1 entry23
%A Baur, H.
%A Jelting, S.
%A Benson, N.
%A Fruehauf, N.
%D 2006
%J Journal of the SID, February 2006, Vol. 14, Issue 2, pp. 119-126
%K IGM imported
%T An LTPS active-matrix process with PECVD doped N+ drain/source areas
@article{entry23,
added-at = {2018-12-19T17:55:21.000+0100},
author = {Baur, H. and Jelting, S. and Benson, N. and Fruehauf, N.},
biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b4c8a5808a235cd89c3c4a005baabe69/pschalberger},
interhash = {9debbd0ef139ba12ca5bd148e8093887},
intrahash = {b4c8a5808a235cd89c3c4a005baabe69},
journal = {Journal of the SID, February 2006, Vol. 14, Issue 2, pp. 119-126},
keywords = {IGM imported},
timestamp = {2018-12-19T16:56:08.000+0100},
title = {An LTPS active-matrix process with PECVD doped N+ drain/source areas},
year = 2006
}