%0 Journal Article %1 entry23 %A Baur, H. %A Jelting, S. %A Benson, N. %A Fruehauf, N. %D 2006 %J Journal of the SID, February 2006, Vol. 14, Issue 2, pp. 119-126 %K IGM imported %T An LTPS active-matrix process with PECVD doped N+ drain/source areas

@article{entry23, added-at = {2018-12-19T17:55:21.000+0100}, author = {Baur, H. and Jelting, S. and Benson, N. and Fruehauf, N.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2b4c8a5808a235cd89c3c4a005baabe69/pschalberger}, interhash = {9debbd0ef139ba12ca5bd148e8093887}, intrahash = {b4c8a5808a235cd89c3c4a005baabe69}, journal = {Journal of the SID, February 2006, Vol. 14, Issue 2, pp. 119-126}, keywords = {IGM imported}, timestamp = {2018-12-19T16:56:08.000+0100}, title = {An LTPS active-matrix process with PECVD doped N+ drain/source areas}, year = 2006 }