%0 Journal Article %1 s21041103 %A Arezki, Yassir %A Su, Rong %A Heikkinen, Ville %A Leprete, François %A Posta, Pavel %A Bitou, Youichi %A Schober, Christian %A Mehdi-Souzani, Charyar %A Alzahrani, Bandar Abdulrahman Mohammed %A Zhang, Xiangchao %A Kondo, Yohan %A Pruss, Christof %A Ledl, Vit %A Anwer, Nabil %A Bouazizi, Mohamed Lamjed %A Leach, Richard %A Nouira, Hichem %D 2021 %J Sensors %K christian_schober christof_pruss ito journal reviewed %N 4 %R 10.3390/s21041103 %T Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level %U https://www.mdpi.com/1424-8220/21/4/1103 %V 21 %X The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.

@article{s21041103, abstract = {The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and freeform optical surfaces based on minimum zone fitting. Two thermo-invariant material measures were designed, manufactured using a magnetorheological finishing process and selected for the evaluation of a number of ultra-high-precision measurement machines. All collected data sets were analysed using the implemented robust reference minimum zone (Hybrid Trust Region) fitting algorithm to extract the values of form error. Agreement among the results of several partners was observed, which demonstrates the establishment of a traceable reference full metrology chain for aspherical and freeform optical surfaces with small amplitudes.}, added-at = {2023-06-26T08:41:51.000+0200}, article-number = {1103}, author = {Arezki, Yassir and Su, Rong and Heikkinen, Ville and Leprete, François and Posta, Pavel and Bitou, Youichi and Schober, Christian and Mehdi-Souzani, Charyar and Alzahrani, Bandar Abdulrahman Mohammed and Zhang, Xiangchao and Kondo, Yohan and Pruss, Christof and Ledl, Vit and Anwer, Nabil and Bouazizi, Mohamed Lamjed and Leach, Richard and Nouira, Hichem}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/2a0d7c14c7877eaab1a63b56a1b229651/ffischer}, doi = {10.3390/s21041103}, interhash = {a3d9d3cb137130c1e56960b31cb05102}, intrahash = {a0d7c14c7877eaab1a63b56a1b229651}, issn = {1424-8220}, journal = {Sensors}, keywords = {christian_schober christof_pruss ito journal reviewed}, number = 4, pubmedid = {33562598}, timestamp = {2023-08-10T10:17:29.000+0200}, title = {Traceable Reference Full Metrology Chain for Innovative Aspheric and Freeform Optical Surfaces Accurate at the Nanometer Level}, url = {https://www.mdpi.com/1424-8220/21/4/1103}, volume = 21, year = 2021 }