%0 Journal Article %1 burghartz1989selective %A Burghartz, Joachim N. %A Warnock, James D. %A Mader, Siegfried R. %A Ginsberg, Barry J. %C Stevenage %D 1989 %I IET %J Electronics Letters %K INES %N 20 %P 1337-1338 %R 10.1049/el:19890893 %T Selective Epitaxial Refill for In-Trench Device Fabrication %V 25

@article{burghartz1989selective, added-at = {2019-04-16T10:11:57.000+0200}, address = {Stevenage}, author = {Burghartz, Joachim N. and Warnock, James D. and Mader, Siegfried R. and Ginsberg, Barry J.}, biburl = {https://puma.ub.uni-stuttgart.de/bibtex/285b72de4925474ff72ebd2d745c6441f/kevin.konnerth}, day = 28, doi = {10.1049/el:19890893}, interhash = {03381160ff26f638edbd882f3b14c147}, intrahash = {85b72de4925474ff72ebd2d745c6441f}, issn = {0013-5194}, journal = {Electronics Letters}, keywords = {INES}, month = sep, number = 20, pages = {1337-1338}, publisher = {IET}, timestamp = {2019-04-16T08:11:57.000+0200}, title = {Selective Epitaxial Refill for In-Trench Device Fabrication}, volume = 25, year = 1989 }